Outline
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
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The swing curve collected on PFI98DA2 resist for the optical process. | Download Scientific Diagram
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Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
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A study of swing-curve physics in diffraction-based overlay
shows the CD swing curve for 60 and 220 nm alt PSM lines on 137 nm... | Download Scientific Diagram
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Single Machine Infinite Bus (SMIB) System: Development of Swing Equation
Swing curve of the machine for various values of k | Download Scientific Diagram
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Plot of Eo swing curve for 193 nm gate level resist on top of organic... | Download Scientific Diagram
